Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11618954 | Dry etching method, method for manufacturing semiconductor device, and etching device | Kunihiro Yamauchi, Akifumi Yao | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11618954 | Dry etching method, method for manufacturing semiconductor device, and etching device | Kunihiro Yamauchi, Akifumi Yao | 2023-04-04 |