Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566177 | Dry etching agent, dry etching method and method for producing semiconductor device | Hiroyuki Oomori, Akifumi Yao | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566177 | Dry etching agent, dry etching method and method for producing semiconductor device | Hiroyuki Oomori, Akifumi Yao | 2023-01-31 |