Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555783 | Method for detecting particles on the surface of an object, wafer, and mask blank | Michael Gerhard | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555783 | Method for detecting particles on the surface of an object, wafer, and mask blank | Michael Gerhard | 2023-01-17 |