Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11647288 | Device for measuring masks for microlithography and autofocusing method | — | 2023-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11647288 | Device for measuring masks for microlithography and autofocusing method | — | 2023-05-09 |