Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550225 | EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source | Iris Pilch, Christof Metzmacher, Michael Hagg | 2023-01-10 |