Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815817 | Field facet system, optical arrangement and lithography apparatus | Guenter Rudolph | 2023-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815817 | Field facet system, optical arrangement and lithography apparatus | Guenter Rudolph | 2023-11-14 |