Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650510 | Projection optical unit for microlithography and method for producing a structured component | Holger Muenz, Christoph Menke | 2023-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650510 | Projection optical unit for microlithography and method for producing a structured component | Holger Muenz, Christoph Menke | 2023-05-16 |