Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740562 | Sealing device, component and lithography apparatus | Dieter Bader, Ole Fluegge | 2023-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740562 | Sealing device, component and lithography apparatus | Dieter Bader, Ole Fluegge | 2023-08-29 |