Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835863 | Exposure apparatus, exposure method, and manufacturing method for product | — | 2023-12-05 |
| 11656554 | Exposure apparatus, exposure method, and method of manufacturing article | Daisuke Kobayashi | 2023-05-23 |