Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809089 | Control device, lithography apparatus, measurement apparatus, processing apparatus, planarizing apparatus, and article manufacturing method | Kota Nakano | 2023-11-07 |
| 11651118 | Simulation method, simulation apparatus, and storage medium | Junichi Seki, Yuichiro Oguchi | 2023-05-16 |