Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815861 | Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method | Yuichiro Miki | 2023-11-14 |
| 11714352 | Imprinting apparatus, imprinting method, method for producing article, substrate, and mold | — | 2023-08-01 |
| 11584063 | Imprint method, imprint apparatus, and article manufacturing method | — | 2023-02-21 |