Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841614 | Exposure apparatus, exposure method, and article manufacturing method | Kanji Suzuki | 2023-12-12 |
| 11592750 | Exposure apparatus, exposure method, decision method, and article manufacturing method | — | 2023-02-28 |