Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842918 | Wafer chuck, method for producing the same, and exposure apparatus | — | 2023-12-12 |
KH
Keiji Hirabayashi
Overall (2023): #369,372 of 537,848Top 70%
1
Patents 2023