Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835470 | Detection apparatus, detection method, exposure apparatus, exposure system, and article manufacturing method | — | 2023-12-05 |
KK
Kazuya Kijima
Overall (2023): #374,375 of 537,848Top 70%
1
Patents 2023