Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598565 | Cooling apparatus having multiple evaporators for cooling objects having different amounts of heat generation, exposure apparatus including cooling apparatus, and industrial apparatus including cooling apparatus | Masakazu Nagata, Yuusuke Suzuki | 2023-03-07 |