Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810748 | Ion gun and vacuum processing apparatus | Tsutomu Hiroishi, Reiji Sakamoto | 2023-11-07 |
| 11600295 | Vacuum process apparatus and vacuum process method | Masahiro Shibamoto | 2023-03-07 |