Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815811 | Magnification ramp scheme to mitigate template slippage | Jeffrey D. Klein, Steven T. Jenkins | 2023-11-14 |
| 11698583 | Imprint apparatus and article manufacturing method | Hiroshi Sato | 2023-07-11 |