Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837491 | Electrostatic chuck and reaction chamber | Quanyu Shi | 2023-12-05 |
| 11732346 | Physical vapor deposition chamber and physical vapor deposition apparatus | Hongrui Guo, Bing Li | 2023-08-22 |