Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815402 | Wavefront sensor and associated metrology apparatus | Peter Danny Van Voorst | 2023-11-14 |
| 11626704 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Sander Bas Roobol, Pavel Evtushenko | 2023-04-11 |