Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11573496 | Method of reducing effects of lens heating and/or cooling in a lithographic process | Martijn Cornelis Schaafsma | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11573496 | Method of reducing effects of lens heating and/or cooling in a lithographic process | Martijn Cornelis Schaafsma | 2023-02-07 |