Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11789369 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Joost Jeroen Ottens | 2023-10-17 |