Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11579533 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more | 2023-02-14 |