Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11738376 | Method and system for the removal and/or avoidance of contamination in charged particle beam systems | Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard | 2023-08-29 |
| 11599028 | Methods and systems for clamping a substrate | — | 2023-03-07 |