Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774865 | Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus | Thijs Adriaan Cornelis Van Keulen, Ramidin Izair Kamidi, Willem Herman Gertruda Anna Koenen | 2023-10-03 |