Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762304 | Lithographic apparatus | Güneş Nak{dot over (i)}boğlu, Maarten Holtrust, Martinus Van Duijnhoven, Francis Fahrni, Frank Johannes Jacobus Van Boxtel +2 more | 2023-09-19 |
| 11579533 | Substrate holder, a lithographic apparatus and method of manufacturing devices | Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Yuri Johannes Gabriël Van De Vijver, Bert Dirk SCHOLTEN +1 more | 2023-02-14 |