Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556060 | Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus | Seyed Iman Mossavat, Bastiaan Onne Fagginger Auer, Remco Dirks, Hugo Augustinus Joseph Cramer | 2023-01-17 |