Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543814 | Methods of modelling systems or performing predictive maintenance of lithographic systems | David Evert Song Kook Sigtermans, René Fussenich, Errol Arthur Zalmijn, Marcel Richard André Brunt, Stefan Voinea | 2023-01-03 |