Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11656555 | Lithographic apparatus and illumination uniformity correction system | Janardan Nath, Kalyan Kumar MANKALA, Joseph H. Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter +2 more | 2023-05-23 |