Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740561 | Metrology system, lithographic apparatus, and calibration method | Nikhil Mehta | 2023-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740561 | Metrology system, lithographic apparatus, and calibration method | Nikhil Mehta | 2023-08-29 |