Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550231 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Jeffrey John Lombardo, Ronald Peter Albright, Daniel Leslie Hall, Victor Antonio PEREZ-FALCON | 2023-01-10 |