Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827999 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER, Shawn George Thomas | 2023-11-28 |
| 11747209 | System and method for thermally calibrating semiconductor process chambers | Caleb Miskin, Hyeongeu Kim | 2023-09-05 |