Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823876 | Substrate processing apparatus | Changmin Lee | 2023-11-21 |
| 11646184 | Substrate processing apparatus | HyungChul Moon | 2023-05-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823876 | Substrate processing apparatus | Changmin Lee | 2023-11-21 |
| 11646184 | Substrate processing apparatus | HyungChul Moon | 2023-05-09 |