Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685991 | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process | Matthias Minjauw, Christophe Detavernier | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685991 | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process | Matthias Minjauw, Christophe Detavernier | 2023-06-27 |