Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769682 | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith | Edwin den Hartog-Besselink | 2023-09-26 |
| 11682572 | Storage device for storing wafer cassettes for use with a batch furnace | — | 2023-06-20 |