Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11568198 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11568198 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2023-01-31 |