Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756925 | Methods and apparatus for vacuum processing a substrate | Ying Wang | 2023-09-12 |
| 11566322 | Shadow mask with plasma resistant coating | Xi Huang, Fei Peng, Kiran Krishnapur, Jrjyan Jerry CHEN, Steven Verhaverbeke +1 more | 2023-01-31 |