Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687008 | Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof | Bernhard Mueller, Robert Trauner, Bernhard Schuler, Peter C. Staffansson, Volker Daiker | 2023-06-27 |
| 11610755 | Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample | Robert Trauner, Bernhard Schuler, Bernhard Mueller, Nikolai KNAUB | 2023-03-21 |