Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803118 | Methods and apparatus for photomask processing | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-10-31 |
| 11798799 | Ultraviolet and ozone clean system | Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN | 2023-10-24 |
| 11654460 | Megasonic clean with cavity property monitoring | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-05-23 |
| 11644748 | Multi-volume baking chamber for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2023-05-09 |