Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610800 | Capacitive method of detecting wafer chucking and de-chucking | Syam Sundeep Boosa, Gopu Krishna, Rupankar Choudhury | 2023-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610800 | Capacitive method of detecting wafer chucking and de-chucking | Syam Sundeep Boosa, Gopu Krishna, Rupankar Choudhury | 2023-03-21 |