Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774370 | Apparatus for processing substrate and method for measuring temperature of substrate | Yong Soo MOON, Hahn Joo YOON, Seung Hwan Lee, Oh-Seung Kwon | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774370 | Apparatus for processing substrate and method for measuring temperature of substrate | Yong Soo MOON, Hahn Joo YOON, Seung Hwan Lee, Oh-Seung Kwon | 2023-10-03 |