Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11856858 | Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films | Craig Moe, Arthur E. Geiss | 2023-12-26 |
| 11832521 | Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers | Craig Moe | 2023-11-28 |
| 11618968 | Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers | Craig Moe | 2023-04-04 |