Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837481 | Wafer chucking monitor | Carlos Alicea | 2023-12-05 |
| 11562918 | Wafer chucking monitor using high frequency injected AC signal | Carlos Alicea | 2023-01-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837481 | Wafer chucking monitor | Carlos Alicea | 2023-12-05 |
| 11562918 | Wafer chucking monitor using high frequency injected AC signal | Carlos Alicea | 2023-01-24 |