Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804362 | Frequency tuning for modulated plasma systems | — | 2023-10-31 |
| 11711022 | Series stack switch circuit with voltage clamping and power recovery | — | 2023-07-25 |
| 11705822 | Voltage clamp and current clamp systems with power recovery | — | 2023-07-18 |
| 11651939 | Inter-period control system for plasma power delivery system and method of operating same | — | 2023-05-16 |
| 11615943 | Inter-period control for passive power distribution of multiple electrode inductive plasma source | — | 2023-03-28 |
| 11610763 | Inter-period control system for plasma power delivery system and method of operating the same | — | 2023-03-21 |