Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848217 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Fufa Chen, Jian Wang +4 more | 2023-12-19 |
| 11752529 | Method for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2023-09-12 |
| 11638937 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Fufa Chen, Jian Wang +4 more | 2023-05-02 |
| 11633765 | System for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2023-04-25 |
| 11581205 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2023-02-14 |