Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2022-11-08 |
| 11437215 | Electrostatic filter providing reduced particle generation | Alexandre Likhanskii, Antonella Cucchetti, Eric D. Hermanson, Frank Sinclair, Robert C. Lindberg | 2022-09-06 |