Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495434 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2022-11-08 |
| 11437215 | Electrostatic filter providing reduced particle generation | Antonella Cucchetti, Eric D. Hermanson, Frank Sinclair, Jay T. Scheuer, Robert C. Lindberg | 2022-09-06 |
| D956005 | Shaped electrode | Robert C. Lindberg, Wayne LeBlanc, Frank Sinclair, Svetlana B. Radovanov | 2022-06-28 |