Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454949 | Auto-correlation of wafer characterization data and generation of composite wafer metrics during semiconductor device fabrication | Shivam Agarwal, Hariharasudhan Koteeswaran, Priyank Paras Jain, Suvi Murugan | 2022-09-27 |
| 11393118 | Metrics for asymmetric wafer shape characterization | Shivam Agarwal, Priyank Paras Jain, Chiou Shoei Chee | 2022-07-19 |