Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Ming Zhang, Leijie Wang, Weinan Ye, Fuzhong Yang +1 more | 2022-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Ming Zhang, Leijie Wang, Weinan Ye, Fuzhong Yang +1 more | 2022-12-13 |