Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525673 | Five-degree-of-freedom heterodyne grating interferometry system | Yu Zhu, Ming Zhang, Leijie Wang, Weinan Ye, Yizhou XIA +1 more | 2022-12-13 |
| 11307018 | Two-degree-of-freedom heterodyne grating interferometry measurement system | Yu Zhu, Ming Zhang, Leijie Wang, Rong Cheng, Xin Li +2 more | 2022-04-19 |