Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257702 | Power supply apparatus for electrostatic chuck and substrate control method | Katsunori Fujii, Masanori Ito | 2022-02-22 |
| 11214857 | Method for manufacturing aluminum alloy member | Yusuke YOKOTA, Hirotsune Watanabe, Makoto Kikuchi, Hiroshi Kawahara, Jun Yaokawa +1 more | 2022-01-04 |